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\u7814\u7a76\u6982\u8981
\n<\/strong>\u3000\u6750\u6599\u7269\u6027\u306e\u70b9\u3067\u5f93\u6765\u306eSi\u7cfb\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3068\u6bd4\u8f03\u3057\u3066\u5727\u5012\u7684\u306b\u640d\u5931\u4f4e\u6e1b\u304c\u53ef\u80fd\u306a\u7a92\u5316\u7269\u534a\u5c0e\u4f53\uff08GaN\uff09\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u3001\u7279\u6027\u3060\u3051\u3067\u306a\u304f\u3001\u4f7f\u3044\u6613\u3055\u3001\u4f5c\u308a\u6613\u3055\u3092\u5411\u4e0a\u3055\u305b\u3001\u7d99\u7d9a\u7684\u306b\u9032\u5316\u3055\u305b\u308b\u305f\u3081\u306e\u57fa\u76e4\u6280\u8853\u306e\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u65b0\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5275\u51fa\u306e\u7a2e\u3068\u306a\u308b\u30ad\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u306b\u3082\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002<\/td>\n		<\/td>\n\u7279\u5fb4
\n<\/strong>\u3000Si\u534a\u5c0e\u4f53\u3067\u306f\u5f53\u305f\u308a\u524d\u306e\u57fa\u76e4\u6280\u8853\u3067\u3042\u308b\u9762\u5185\u3067\u306e\u30c9\u30fc\u30d4\u30f3\u30b0\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5236\u5fa1\u3001\u4f4e\u30c0\u30e1\u30fc\u30b8\u9ad8\u7cbe\u7d30\u52a0\u5de5\u6280\u8853\u3001\u30c7\u30d0\u30a4\u30b9\u30e2\u30c7\u30eb\u3092\u4e2d\u5fc3\u306b\u6280\u8853\u958b\u767a\u3092\u884c\u3044\u306a\u304c\u3089\u3001\u305d\u306e\u6280\u8853\u3092\u5b9f\u969b\u306eGaN\u7d20\u5b50\u4f5c\u88fd\u306b\u5fdc\u7528\u3059\u308b\u3053\u3068\u306e\u6709\u7528\u6027\u3092\u5b9f\u8a3c\u3057\u3066\u3044\u307e\u3059\u3002<\/td>\n<\/tr>\n
\u80cc\u666f\u30fb\u5f93\u6765\u6280\u8853
\n<\/strong>\u3000\u6d88\u8cbb\u96fb\u529b\u306e\u5927\u304d\u3044\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u7d20\u5b50\u3084\u9ad8\u5468\u6ce2\u534a\u5c0e\u4f53\u7d20\u5b50\u3067\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u6709\u52b9\u5229\u7528\u306e\u70b9\u304b\u3089\u7279\u6027\u5411\u4e0a\u306e\u8981\u8acb\u306f\u5f37\u304f\u3001\u5f93\u6765\u306eSi\u306b\u4ee3\u308f\u308bGaN\u306a\u3069\u65b0\u898f\u6750\u6599\u3092\u7528\u3044\u305f\u7d20\u5b50\u306b\u5bfe\u3059\u308b\u671f\u5f85\u304c\u5927\u304d\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u78ba\u304b\u306bGaN\u306f\u3001\u512a\u308c\u305f\u6750\u6599\u7269\u6027\u304b\u3089\u7d20\u5b50\u7279\u6027\u306f\u5411\u4e0a\u3057\u307e\u3059\u304c\u3001Si\u534a\u5c0e\u4f53\u307b\u3069\u57fa\u76e4\u6280\u8853\u304c\u6210\u719f\u3057\u3066\u3044\u306a\u3044\u305f\u3081\u3001Si\u534a\u5c0e\u4f53\u7d20\u5b50\u3067\u306f\u5f53\u305f\u308a\u524d\u306b\u3067\u304d\u308b\u3053\u3068\u304c\u3067\u304d\u3066\u3044\u307e\u305b\u3093\u3002<\/td>\n		<\/td>\n\u5b9f\u7528\u5316\u30a4\u30e1\u30fc\u30b8
\n<\/strong>\u3000\u4f8b\u3048\u3070\u3001\u4f4e\u30c0\u30e1\u30fc\u30b8\u9078\u629e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u9ad8\u3044\u95be\u5024\u5236\u5fa1\u6027\u3092\u6709\u3059\u308b\u30ce\u30fc\u30de\u30ea\u30aa\u30d5\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084\u5fae\u7d30\u30d7\u30ed\u30bb\u30b9\u306b\u983c\u3089\u306a\u3044\u9ad8\u5468\u6ce2\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5b9f\u73fe\u306b\u9069\u5fdc\u3057\u307e\u3059\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\"\"<\/a>
\n\"\"<\/a><\/center><\/p>\n

\u4f01\u696d\u7b49\u3078\u306e\u63d0\u6848 <\/strong><\/span><\/p>\n

\u7814\u7a76\u8005\u304b\u3089\u306e\u30e1\u30c3\u30bb\u30fc\u30b8<\/strong>
\n\u3000\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u958b\u767a\u306f\u6280\u8853\u306b\u88cf\u4ed8\u3051\u3055\u308c\u305f\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u304c\u63cf\u3051\u308b\u3053\u3068\u304c\u91cd\u8981\u3060\u3068\u8003\u3048\u3066\u3044\u307e\u3059\u3002\u7814\u7a76\u5ba4\u3067\u306f\u3001\u7a92\u5316\u7269\u534a\u5c0e\u4f53\u3092\u4e2d\u5fc3\u3068\u3057\u3066\u3001\u4f01\u696d\u3060\u3051\u3067\u306e\u53d6\u308a\u7d44\u307f\u304c\u96e3\u3057\u3044\u57fa\u76e4\u6280\u8853\u306e\u78ba\u7acb\u3092\u901a\u3057\u3066\u3001\u7523\u696d\u306e\u767a\u5c55\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002<\/p>\n

\u6587\u732e\u30fb\u7279\u8a31<\/strong>
\n\u30fbD. Christy et al., Electronics Letters (2015\u767a\u884c\u4e88\u5b9a)
\n\u30fbA. Wakejima et al., Applied Physics Express, Vol. 8, 026502 (2015)
\n\u30fbS. Mase et al., Applied Physics Express, Vol. 8, 036601 (2015)
\n\u30fbT. Narita et al., Electronics Letters, Vol. 50, 1162 (2014)
\n\u30fb\u7279\u958b2013-098505, \u300e\u7d2b\u5916\u7dda\u900f\u904e\u30b2\u30fc\u30c8\u96fb\u6975\u3092\u6709\u3059\u308b\u96fb\u754c\u52b9\u679c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u300f<\/p>\n\n\n\n
\u8a66\u4f5c\u54c1\u72b6\u6cc1<\/strong><\/td>\n\u7121\u3057<\/td>\n\u63b2\u793a\u53ef<\/td>\n\u63d0\u4f9b\u53ef<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

 <\/p>\n\n\n\n
\u5229\u7528\u53ef\u80fd\u306a\u8a2d\u5099\u30fb\u88c5\u7f6e<\/strong>
\n\u96fb\u5b50\u7dda\u9732\u5149\u88c5\u7f6e
\nICP\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30e3\u30fc
\n\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1\uff08\u96fb\u6d41\u3001\u96fb\u4f4d\u6e2c\u5b9a\u7b49\u30aa\u30d7\u30b7\u30e7\u30f3\u3042\u308a\uff09
\n\u9ad8\u5468\u6ce2\uff08110GHz\uff09\u30d9\u30af\u30c8\u30eb\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\n<\/td>\n		\u5171\u540c\u7814\u7a76\u3092\u5e0c\u671b\u3059\u308b\u30c6\u30fc\u30de<\/strong>
\n\u9078\u629e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7528\u3044\u305f\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u958b\u767a
\n\u7a92\u5316\u7269\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u30e2\u30c7\u30ea\u30f3\u30b0
\n\u30df\u30ea\u6ce2\u5e2f\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u958b\u767a
\n\u7121\u7dda\u96fb\u529b\u4f1d\u9001<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n
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