{"id":3499,"date":"2015-01-13T14:09:37","date_gmt":"2015-01-13T05:09:37","guid":{"rendered":"https:\/\/seeds.web.nitech.ac.jp\/?p=3499"},"modified":"2020-02-05T16:12:40","modified_gmt":"2020-02-05T07:12:40","slug":"mems%e3%81%a8%e3%83%ac%e3%83%bc%e3%82%b6%e3%83%bc%e8%a8%88%e6%b8%ac%e3%81%ab%e3%82%88%e3%82%8b%e5%a3%81%e9%9d%a2%e3%81%ae%e5%8c%96%e5%ad%a6%e7%9a%84%e5%8a%b9%e6%9e%9c%e3%81%ae%e8%a7%a3%e6%98%8e","status":"publish","type":"post","link":"https:\/\/seeds.web.nitech.ac.jp\/?p=3499","title":{"rendered":"MEMS\u3068\u30ec\u30fc\u30b6\u30fc\u8a08\u6e2c\u306b\u3088\u308b\u58c1\u9762\u306e\u5316\u5b66\u7684\u52b9\u679c\u306e\u89e3\u660e"},"content":{"rendered":"

\uff5eMEMS\u58c1\u9762\u304c\u9020\u308a\u51fa\u3059\u9769\u65b0\u7684\u30de\u30a4\u30af\u30ed\u30a8\u30cd\u30eb\u30ae\u30fc\uff5e<\/strong><\/h4>\n

MEMS\u3068\u30ec\u30fc\u30b6\u30fc\u8a08\u6e2c\u306b\u3088\u308b\u58c1\u9762\u306e\u5316\u5b66\u7684\u52b9\u679c\u306e\u89e3\u660e<\/h2>\n\n\n\n\n
\u7814\u7a76\u5206\u91ce\u5206\u985e\uff1a<\/strong>5505 \u71b1\u5de5\u5b66
\n\u7523\u696d\u5206\u985e\uff1a<\/strong>\u60c5\u5831\u901a\u4fe1\u6a5f\u68b0\u5668\u5177\u88fd\u9020\u696d\uff0c\u8f38\u9001\u7528\u6a5f\u68b0\u5668\u5177\u88fd\u9020\u696d<\/td>\n<\/tr>\n
\u30ad\u30fc\u30ef\u30fc\u30c9\uff1a<\/strong>\u30de\u30a4\u30af\u30ed\u71c3\u713c\uff0c\u8868\u9762\u53cd\u5fdc\uff0c\u5316\u5b66\u7684\u6d88\u708e\uff0cMEMS\uff0c\u30ec\u30fc\u30b6\u30fc\u8a08\u6e2c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n\n
\u5de5\u5b66 <\/strong><\/td>\n<\/tr>\n
\u6a5f\u68b0\u5de5\u5b66<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n
\u9f4b\u6728\u3000\u60a0\uff08\u6a5f\u80fd\u5de5\u5b66\u5c02\u653b\uff09<\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n\n
\u7814\u7a76\u6982\u8981
\n<\/strong>\u3000\u71c3\u713c\u5668\u58c1\u9762\u8fd1\u304f\u306e\u706b\u708e\u306f\u58c1\u306e\u6d88\u708e\u52b9\u679c\u3092\u5f37\u304f\u53d7\u3051\u3001\u4f8b\u3048\u3070\u8d85\u5c0f\u578b\u71c3\u713c\u5668\u3067\u306f\u706b\u708e\u306e\u5b89\u5b9a\u6027\u304c\u8457\u3057\u304f\u60aa\u5316\u3057\u307e\u3059\u3002\u672c\u7814\u7a76\u3067\u306f\u3001\u706b\u708e\u4e2d\u306e\u4e2d\u9593\u751f\u6210\u7269\uff08\u30e9\u30b8\u30ab\u30eb\uff09\u304c\u58c1\u9762\u3067\u306e\u8868\u9762\u53cd\u5fdc\u306b\u3088\u308a\u7834\u58ca\u3055\u308c\u308b\u5316\u5b66\u7684\u6d88\u708e\u52b9\u679c\u3092\u89e3\u660e\u3057\u3001\u30de\u30a4\u30af\u30ed\u30b9\u30b1\u30fc\u30eb\u71c3\u713c\uff08<1 mm\uff09\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u307e\u3059\u3002<\/td>\n		<\/td>\n\u7279\u5fb4
\n<\/strong>\u3000\u672c\u7814\u7a76\u306f\u3001MEMS \u6280\u8853\u3068\u9855\u5fae\u30ec\u30fc\u30b6\u30fc\u8a08\u6e2c\u3092\u878d\u5408\u3059\u308b\u3053\u3068\u3067\u3001\u8868\u9762\u6027\u72b6\uff08\u6750\u8cea\u30fb\u6b20\u9665\uff09\u3092\u7dfb\u5bc6\u306b\u5236\u5fa1\u3057\u305f\u58c1\u9762\u3068\u30e9\u30b8\u30ab\u30eb\u306e\u5438\u7740\u5f37\u5ea6\u3092\u7cfb\u7d71\u7684\u304b\u3064\u5b9a\u91cf\u7684\u306b\u8a55\u4fa1\u3059\u308b\u70b9\u306b\u5927\u304d\u306a\u7279\u8272\u304c\u3042\u308a\u3001\u5316\u5b66\u7684\u52b9\u679c\u306e\u8a73\u7d30\u53cd\u5fdc\u30e2\u30c7\u30eb\u306e\u69cb\u7bc9\u3092\u53ef\u80fd\u3068\u3057\u307e\u3059\u3002<\/td>\n<\/tr>\n
\u80cc\u666f\u30fb\u5f93\u6765\u6280\u8853
\n<\/strong>\u3000\u643a\u5e2f\u60c5\u5831\u901a\u4fe1\u7aef\u672b\u3084\u5c0f\u578b\u533b\u7642\u6a5f\u5668\u306e\u9ad8\u6027\u80fd\u5316\u306b\u4f34\u3044\u3001\u71c3\u6599\u304b\u3089\u767a\u96fb\u3059\u308b\u30de\u30a4\u30af\u30ed\u71c3\u713c\u30b7\u30b9\u30c6\u30e0\u304c\u30012 \u6b21\u96fb\u6c60\u3088\u308a\u3082\u657010 \u500d\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u5bc6\u5ea6\u3092\u6301\u3064\u30e2\u30d0\u30a4\u30eb\u30fb\u30a8\u30cd\u30eb\u30ae\u30fc\u6e90\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u30de\u30a4\u30af\u30ed\u71c3\u713c\u3092\u5b89\u5b9a\u7dad\u6301\u3059\u308b\u4e0a\u3067\u6975\u3081\u3066\u91cd\u8981\u306a\u58c1\u9762\u306e\u5316\u5b66\u7684\u52b9\u679c\u306b\u95a2\u3059\u308b\u77e5\u898b\u306f\u3001\u5b9f\u9a13\u8a08\u6e2c\u304c\u56f0\u96e3\u306a\u3053\u3068\u304b\u3089\u7686\u7121\u306b\u7b49\u3057\u3044\u306e\u304c\u73fe\u72b6\u3067\u3059\u3002<\/td>\n		<\/td>\n\u5b9f\u7528\u5316\u30a4\u30e1\u30fc\u30b8
\n<\/strong>\u3000\u5316\u5b66\u7684\u52b9\u679c\u306e\u30e2\u30c7\u30eb\u5316\u3092\u901a\u3058\u3066\u3001\u706b\u708e\u306b\u5bfe\u3057\u5b8c\u5168\u306b\u4e0d\u6d3b\u6027\u306a\u58c1\u9762\u3092\u898b\u51fa\u305b\u308c\u3070\u3001\u9ad8\u4ed8\u52a0\u4fa1\u5024\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u306e\u305f\u3081\u306e\u30de\u30a4\u30af\u30ed\u71c3\u713c\u5668\u30fb\u6539\u8cea\u5668\u306e\u5275\u51fa\u3084\u3001\u58c1\u9762\u3092\u6709\u3059\u308b\u591a\u304f\u306e\u5185\u71c3\u6a5f\u95a2\u30fb\u5de5\u696d\u7089\u306e\u4e00\u5c64\u306e\u6027\u80fd\u5411\u4e0a\u306b\u8ca2\u732e\u3067\u304d\u308b\u3068\u8003\u3048\u3089\u308c\u307e\u3059\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\"\"<\/a><\/p>\n

\u4f01\u696d\u7b49\u3078\u306e\u63d0\u6848 <\/strong><\/span><\/p>\n

\u7814\u7a76\u8005\u304b\u3089\u306e\u30e1\u30c3\u30bb\u30fc\u30b8<\/strong>
\n\u3000MEMS \u6280\u8853\u3068\u5148\u7aef\u8a08\u6e2c\u6280\u8853\u3092\u7528\u3044\u305f\u3001\u30de\u30a4\u30af\u30ed\u30a8\u30cd\u30eb\u30ae\u30fc\u6e90\u306e\u5275\u88fd\u3084\u6b21\u4e16\u4ee3\u30ac\u30b9\u30bf\u30fc\u30d3\u30f3\u30fb\u30a8\u30f3\u30b8\u30f3\u71c3\u713c\u30b7\u30b9\u30c6\u30e0\u306e\u958b\u767a\u3092\u5922\u898b\u3066\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u307e\u3059\u3002\u3054\u8208\u5473\u306e\u3042\u308b\u65b9\u306f\u3001\u662f\u975e\u3054\u9023\u7d61\u4e0b\u3055\u3044\u3002<\/p>\n

\u6587\u732e\u30fb\u7279\u8a31<\/strong>
\n\u30fb\u9f4b\u6728\u60a0\uff0c\u9234\u6728\u96c4\u4e8c\uff0c\u65e5\u672c\u71c3\u713c\u5b66\u4f1a\u8a8c\uff0cvol. 56\uff0cpp. 80-87 (2014)
\n\u30fbSaiki, Y. and Suzuki, Y., Proc. Combust. Inst. vol. 34, pp. 3395-3402 (2013)
\n\u30fb\u9f4b\u6728\u60a0\uff0c\u9234\u6728\u96c4\u4e8c\uff0c\u65e5\u672c\u71c3\u713c\u5b66\u4f1a\u8a8c\uff08\u89e3\u8aac\u8a18\u4e8b\uff09\uff0cvol. 55\uff0cpp. 138-146 (2013)<\/p>\n\n\n\n
\u8a66\u4f5c\u54c1\u72b6\u6cc1<\/strong><\/td>\n\u7121\u3057<\/td>\n\u63b2\u793a\u53ef<\/td>\n\u63d0\u4f9b\u53ef<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

 <\/p>\n\n\n\n
\u5229\u7528\u53ef\u80fd\u306a\u8a2d\u5099\u30fb\u88c5\u7f6e<\/strong>
\n\u30fb\u771f\u7a7a\u30a2\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u30ac\u30f3
\n\u30fb\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1
\n\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e
\n\u30fb\u9855\u5faeLIF\u8a08\u6e2c\u88c5\u7f6e<\/td>\n		\u5171\u540c\u7814\u7a76\u3092\u5e0c\u671b\u3059\u308b\u30c6\u30fc\u30de<\/strong>
\n\u30fb\u30de\u30a4\u30af\u30ed\u71c3\u713c\u5668\u306e\u958b\u767a
\n\u30fb\u71c3\u6599\u96fb\u6c60\u306e\u305f\u3081\u306e\u5c0f\u578b\u6539\u8cea\u5668\u306e\u958b\u767a
\n\u30fb\u5185\u71c3\u6a5f\u95a2\u3067\u306e\u58c1\u9762\u8fd1\u508d\u306e\u71c3\u713c\u6319\u52d5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n
\u7814\u7a76\u8005\u30c7\u30fc\u30bf\u30d9\u30fc\u30b9\u3068\u306e\u30ea\u30f3\u30af<\/strong>\uff08\u540d\u524d\u3092\u30af\u30ea\u30c3\u30af\u3057\u3066\u304f\u3060\u3055\u3044\uff09
\n\u7814\u7a76\u8005\u540d\uff1a\u9f4b\u6728\u3000\u60a0<\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n
\uff30\uff24\uff26\u8868\u793a\u3068\u5370\u5237<\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

\uff5eMEMS\u58c1\u9762\u304c\u9020\u308a\u51fa\u3059\u9769\u65b0\u7684\u30de\u30a4\u30af\u30ed\u30a8\u30cd\u30eb\u30ae\u30fc\uff5e MEMS\u3068\u30ec\u30fc\u30b6\u30fc\u8a08\u6e2c\u306b\u3088\u308b\u58c1\u9762\u306e\u5316\u5b66\u7684\u52b9\u679c\u306e\u89e3\u660e \u7814\u7a76\u5206\u91ce\u5206\u985e\uff1a5505 \u71b1\u5de5\u5b66 \u7523\u696d\u5206\u985e\uff1a\u60c5\u5831\u901a\u4fe1\u6a5f\u68b0\u5668\u5177\u88fd\u9020\u696d\uff0c\u8f38\u9001\u7528\u6a5f\u68b0\u5668\u5177\u88fd\u9020\u696d \u30ad\u30fc\u30ef\u30fc\u30c9\uff1a\u30de\u30a4\u30af\u30ed\u71c3\u713c\uff0c\u8868 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":"","_links_to":"","_links_to_target":""},"categories":[60],"tags":[80],"class_list":["post-3499","post","type-post","status-publish","format-standard","hentry","category-b5500","tag-t000"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/posts\/3499","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3499"}],"version-history":[{"count":3,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/posts\/3499\/revisions"}],"predecessor-version":[{"id":4828,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=\/wp\/v2\/posts\/3499\/revisions\/4828"}],"wp:attachment":[{"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3499"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3499"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/seeds.web.nitech.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3499"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}